Thin-film temperature sensor made from particle-filled polymer-derived ceramics pyrolyzed in vacuum

被引：44

作者：

Cui, Zaifu ^{[1
,2
,3
]}

Li, Xin ^{[4
]}

Chen, Guochun ^{[1
,2
,3
]}

Wu, Chao ^{[1
,2
,3
]}

He, Gonghan ^{[1
,2
,3
]}

Hai, Zhenyin ^{[1
,2
,3
]}

Chen, Qinnan ^{[1
,2
,3
]}

Sun, Daoheng ^{[1
,2
,3
]}

机构：

[1] Xiamen Univ, Dept Mech & Elect Engn, Xiamen 361102, Peoples R China

[2] Xiamen Univ, Fujian Micro Nano Mfg Engn Technol Res Ctr, Xiamen 361102, Peoples R China

[3] Xiamen Univ, Fujian Engn & Res Ctr Intelligent Sensing & Contr, Xiamen 361102, Peoples R China

[4] Xiamen Univ, Sch Phys Sci & Technol, Xiamen 361005, Peoples R China

来源：

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 2022年 / 42卷 / 06期

基金：

中国国家自然科学基金;

关键词：

Polymer-derived ceramics; Thin film; Temperature sensor; Vacuum pyrolysis; OXIDATION; FABRICATION;

D O I：

10.1016/j.jeurceramsoc.2022.01.035

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Thin-film sensors have wide applications in the fields of high-temperature measurement, such as in the hot section of aero engines. Polymer-derived ceramics (PDCs) are diversified, ease to shape, and resistant to thermal shock. However, they are seldom used as sensitive parts of thin-film sensors due to the oxidation of PDC thin films. To solve this challenging problem, pyrolysis of PDC thin films in vacuum is proposed in this work, and the anti-oxidation performances are verified in a high-temperature sensor based on such a PDC thin film. The temperature measurement experiment shows that the PDC thin-film temperature sensor with thickness of about 10 mu m pyrolyzed in vacuum can measure temperature from room temperature to 800 degrees C, which provides a feasible way for fabrication of high-temperature PDC thin-film sensors such as heat flux sensors and strain sensors.

引用

页码：2735 / 2742

页数：8

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