Unique behavior of F-centers in high-k Hf-based oxides

被引:14
作者
Umezawa, N
Shiraishi, K
Ohno, T
Boero, M
Watanabe, H
Chikyow, T
Torii, K
Yamabe, K
Yamada, K
Nara, Y
机构
[1] Natl Inst Mat Sci, Tsukuba, Ibaraki 3050044, Japan
[2] Univ Tsukuba, Grad Sch Sci, Tsukuba, Ibaraki 3058571, Japan
[3] Osaka Univ, Grad Sch Engn, Osaka 5650871, Japan
[4] Semicond Leading Edge Technol Inc, Tsukuba, Ibaraki 3058569, Japan
[5] Univ Tsukuba, Inst Appl Phys, Tsukuba, Ibaraki 3058573, Japan
[6] Waseda Univ, Nanotechnol Res Labs, Tokyo 1690041, Japan
关键词
high-k dielectric; HfO2; F-center;
D O I
10.1016/j.physb.2005.12.101
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Physical properties of F-center in HfO2, have been investigated by first-principles calculations. The F-centers (doubly occupied oxygen vacancy V-o) are found to generate gap states at 1.05 eV below the bottom of HfO, conduction band and they are remarkably elevated by extracting electrons from the F-center. The negative-U behavior of F-centers in HFO2 is very different from those in the ionic rocksalt oxide such as MgO or CaO, which possesses positive-U character. The reason for this unique behavior of F-centers in HfO2 is considered to be due to highly positively ionized H& ions, which are largely relaxed outward away from singly occupied or non-occupied F-centers. This outward relaxation is the origin of the remarkable elevations of the F-center levels. Moreover, similar negative-U behavior is also observed in HfON. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:392 / 394
页数:3
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