Aluminium phthalocyanine chloride thin films for temperature sensing

被引:21
作者
Chani, Muhammad Tariq Saeed [1 ]
Asiri, Abdullah M. [1 ,2 ]
Karimov, Kh. S. [3 ,4 ]
Niaz, Atif Khan [3 ]
Khan, Sher Bhadar [1 ,2 ]
Alamry, Khalid. A. [2 ]
机构
[1] King Abdulaziz Univ, Ctr Excellence Adv Mat Res, Jeddah 21589, Saudi Arabia
[2] King Abdulaziz Univ, Fac Sci, Dept Chem, Jeddah 21589, Saudi Arabia
[3] GIK Inst Engn Sci & Technol, Topi 23640, Pakistan
[4] Phys Tech Inst, Dushanbe 734063, Tajikistan
关键词
temperature sensor; thin films; annealing; aluminium phthalocyanine chloride; SENSORS; CELLS;
D O I
10.1088/1674-1056/22/11/118101
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
This study presents the fabrication and temperature sensing properties of sensors based on aluminium phthalocyanine chloride (AlPcCl) thin films. To fabricate the sensors, 50-nm-thick electrodes with 50-mu m gaps between them are deposited on glass substrates. AlPcCl thin films with thickness of 50-100 nm are deposited in the gap between electrodes by thermal evaporation. The resistance of the sensors decreases with increasing thickness and the annealing at 100 degrees C results in an increase in the initial resistance of sensors up to 24%. The sensing mechanism is based on the change in resistance with temperature. For temperature varying from 25 degrees C to 80 degrees C, the change in resistance is up to 60%. Simulation is carried out and results obtained coincide with experimental data with an error of +/-1%.
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页数:5
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