All metal nanoelectromechanical switch working at 300 °C for rugged electronics applications

被引：23

作者：

Qian, You ^{[1
,2
]}

Soon, Bo Woon ^{[1
,2
]}

Singh, Pushpapraj ^{[2
]}

Campanella, Humberto ^{[2
]}

Lee, Chengkuo ^{[1
]}

机构：

[1] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore

[2] ASTAR, Inst Microelect, Singapore 117685, Singapore

来源：

NANOSCALE | 2014年 / 6卷 / 11期

关键词：

RELAY; CIRCUITS;

D O I：

10.1039/c3nr05255a

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

An all metal based electrostatic nanoelectromechanical switch has been fabricated using a one mask process. High temperature cycling behavior is demonstrated in a vacuum chamber at 300 degrees C for more than 28 hours. The compelling results indicate that the design is promising for the realization of rugged electronics with three-dimensional integration.

引用

页码：5606 / 5611

页数：6

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