Silicon microfabricated horns for power ultrasonics

被引：26
作者：
Lal, A
White, RM
机构：
[1] University of California at Berkeley, Berkeley Sensor and Actuator Center, Dept. of Elec. Eng. and Comp. Sci., Berkeley
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1996年 / 54卷 / 1-3期
基金：
美国国家科学基金会;
关键词：
horns; microfabrication; power ultrasonics; silicon;
D O I：
10.1016/S0924-4247(97)80011-8
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
As part of a study of silicon surgical tools, silicon ultrasonic hems for impedance transformation have been made using bulk micromachining. The ultrasonic amplification of silicon stepped, linear, exponential, and catenoidal half-wavelength horns actuated by piezoelectric lead-zirconate-titanate (PZT) plates is measured and found to agree well with predictions from a numerical model. With the catenoidal horn, a maximum ultrasonic velocity of 14.2 m s(-1) is obtained with a displacement of 35 mu m measured at 64.5 kHz at 150 V-pp drive. By way of comparison, in cataract surgery a particle velocity of only 11.9 m s(-1) is used.
引用
收藏
页码：542 / 546
页数：5
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