Ammonia sensing characteristic of a Pt nanoparticle/aluminum-doped zinc oxide sensor

被引：37
|
作者：
Chen, Huey-Ing [1 ]
Chi, Cheng-Yu [2 ]
Chen, Wei-Cheng [2 ]
Liu, I-Ping [1 ]
Chang, Ching-Hong [2 ]
Chou, Tzu-Chieh [2 ]
Liu, Wen-Chau [2 ]
机构：
[1] Natl Cheng Kung Univ, Dept Chem Engn, 1 Univ Rd, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Dept Elect Engn, Inst Microelect, 1 Univ Rd, Tainan 70101, Taiwan
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2018年 / 267卷
关键词：
Pt; AZO; RF sputtering; Ammonia sensor; GAS SENSOR; ZNO NANORODS; THIN-FILMS; PERFORMANCE; PD; EXPOSURE; AU;
D O I：
10.1016/j.snb.2018.04.019
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Pt nanoparticles (NPs) are deposited on a sputtered aluminum-doped zinc oxide (AZO) layer to form a new Pt NP/AZO ammonia sensor. As compared to the pristine sputtered AZO layer, the studied Pt NP/AZO device shows significant improvements in the ammonia sensing response and sensing speed due to the effectively catalytic activity of the Pt metal. Experimentally, under 1000 ppm NH3/air gas at 300 degrees C, a sensing response of 2183 is obtained for the studied Pt NP/AZO device, which is higher than that (24) of the pristine AZO one. The response and recovery time constants at 300 degrees C (350 degrees C) of 133 (24) s and 14 (4) s are acquired, respectively, for the studied Pt NP/AZO sensor under 1000 ppm NH3/air gas. Therefore, based on the advantages mentioned above and the benefits of low cost, simple structure, and easy fabrication, the studied Pt NP/AZO structure is suitable to produce high-performance metal-oxide-based ammonia sensors. (C) 2018 Elsevier B.V. All rights reserved.
引用
收藏
页码：145 / 154
页数：10
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