Influence of hydrogen-enhanced etching on the quality of diamond films and the existing form of sp2 bonding carbon atoms

被引：7

作者：

Ma, BX ^{[1
]}

Yao, N ^{[1
]}

Yang, SE ^{[1
]}

Lu, ZL ^{[1
]}

Fan, ZQ ^{[1
]}

Zhang, BL ^{[1
]}

机构：

[1] Zhengzhou Univ, Inst Engn Phys, Zhengzhou 450052, Peoples R China

来源：

ACTA PHYSICA SINICA | 2004年 / 53卷 / 07期

关键词：

chemical vapor deposition; diamond film; Raman spectrum; enhanced etching;

D O I：

10.7498/aps.53.2287

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Diamond thin films were prepared by using chemical vapor deposition. It is enhanced to etch the sp(2) bonding carbon atoms of the film by intermittently closing the methane gas during the deposition. These films were characterized by Raman spectroscopy and microscopy. The results show that the enhanced etching of sp(2) bonding carbon atoms has no obvious effect on quality and microstructure of the diamond films. It reveals that the sp(2) bonding carbon atoms do not mainly exist in graphitic or amorphous carbon grain form in the films but mainly among the carbon atoms of diamond grain surface or grain boundary.

引用

页码：2287 / 2291

页数：5

共 20 条

[1] GROWTH OF DIAMOND SEED CRYSTALS BY VAPOR DEPOSITION
ANGUS, JC
WILL, HA
STANKO, WS
[J]. JOURNAL OF APPLIED PHYSICS, 1968, 39 (06) : 2915 - &
[2] HIGH ADHESION OF DIAMOND-LIKE FILMS ACHIEVED BY THE PULSED ARC-DISCHARGE METHOD
ANTTILA, A
SALO, J
LAPPALAINEN, R
[J]. MATERIALS LETTERS, 1995, 24 (1-3) : 153 - 156
[3] Influence of methane concentration on the nucleation and growth stages in diamond film deposition
GomezAleixandre, C
Sanchez, O
Vazquez, L
Garcia, MM
Albella, JM
[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1996, 154 (01): : 23 - 32
[4] GU CZ, 1994, CHIN J HIGH PRESSURE, V46, P220
[5] GU CZ, 1997, ACTA PHYS SINICA, V46, P1984
[6] HAN S, 1998, ACTA PHYSICA, V47, P686
[7] Heteroepitaxial diamond growth on pre-deposited β-SiC oriented layer on Si(001) substrate
He, XC
Shen, HS
Zhang, ZM
Wan, YZ
Shen, T
[J]. ACTA PHYSICA SINICA, 2000, 49 (03) : 532 - 537
[8] RAMAN-SCATTERING FROM MEV-ION IMPLANTED DIAMOND
HUNN, JD
WITHROW, SP
WHITE, CW
HEMBREE, DM
[J]. PHYSICAL REVIEW B, 1995, 52 (11): : 8106 - 8111
[9] Amorphous carbon: how much of free hydrogen?
Kapitonov, IN
Konkov, OI
Terukov, EI
Trapeznikova, IN
[J]. DIAMOND AND RELATED MATERIALS, 2000, 9 (3-6) : 707 - 710
[10] CHARACTERIZATION OF DIAMOND FILMS BY RAMAN-SPECTROSCOPY
KNIGHT, DS
WHITE, WB
[J]. JOURNAL OF MATERIALS RESEARCH, 1989, 4 (02) : 385 - 393

← 1 2 →