Wireless Temperature Sensing using a Passive RFID Tag with Film Bulk Acoustic Resonator

被引：7
|
作者：
Lin, Jon-Hong [1 ]
Kao, Yao-Huang [1 ]
机构：
[1] Natl Chiao Tung Univ, Dept Commun Engn, Hsinchu, Taiwan
来源：
2008 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 AND APPENDIX | 2008年
关键词：
RFID; Temperature Sensing; FBAR; AlN;
D O I：
10.1109/ULTSYM.2008.0547
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
The lifetime of active RFID tag is limited by the equipped battery capacity. A passive RFID tag which gathers power via inductive coupling from RF power for temperature sensing was proposed to extend the lifetime of the tag. An oscillator with film bulk acoustic resonator (FBAR) ties at the heart of the tag. A four-layered FBAR with Al/AlN/SiNx/Au composite structure was fabricated. The oscillation frequency of the oscillator varies with the temperature linearly. The temperature can be detected easily by measuring the shift of oscillation frequency. The measured phase noise of the oscillator is -75dBc/Hz at 10 kHz offset. A linear temperature sensitivity of -34.5 ppm/degrees C in the temperature range from 10 and 80 degrees C at 2.48 GHz is achieved.
引用
收藏
页码：2209 / 2212
页数：4
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