Improved radiometry for extreme-ultraviolet lithography

被引：0

作者：

Tarrio, C ^{[1
]}

Vest, RE ^{[1
]}

Grantham, S ^{[1
]}

Liu, K ^{[1
]}

Lucatorto, TB ^{[1
]}

Shaw, PS ^{[1
]}

机构：

[1] Natl Inst Stand & Technol, Phys Lab, Gaithersburg, MD 20899 USA

来源：

SYNCHROTRON RADIATION INSTRUMENTATION | 2004年 / 705卷

关键词：

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The absolute cryogenic radiometer (ACR), an electrical-substitution-based detector, is the most accurate method for measurement of radiant power in the extreme ultraviolet. At the National Institute of Standards and Technology, ACR-based measurements are currently used as standards from the infrared and into the vacuum ultraviolet, however, no radiometric facilities are currently in operation with enough incident power to use an ACR in the extreme-ultraviolet region. Therefore, we have installed transfer optics on an existing beamline to allow the installation of the ACR as an additional endstation. We will describe the current radiometric beamline, the ACR, and the high-throughput beamline, and the transfer-optical system. Finally, we will present the performance of the transfer optics and measurements of the beam profile and incident power of the new endstation.

引用

页码：608 / 611

页数：4

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