FBAR Laterally Coupled Resonator Filter

被引：4

作者：

Wang, Kun ^{[1
]}

Koelle, Uli ^{[1
]}

Larson, John D., III ^{[1
]}

Thalhammer, Robert ^{[2
]}

Martin, Steven ^{[3
]}

机构：

[1] Avago Technol, San Jose, CA 95131 USA

[2] Avago Technol, Munich, Germany

[3] Avago Technol, Ft Collins, CO USA

来源：

2015 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2015年

关键词：

FBAR; lateral coupling; bulk acoustic wave; RF devices;

D O I：

10.1109/ULTSYM.2015.0188

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

a very attractive CRF (Coupled Resonator Filter) topology is to laterally couple thin film bulk acoustic resonators (FBAR). However, the filter band width is narrow because the coupling between conventional FBAR resonators is very weak. The coupling, and thus the bandwidth, may be increased by forming pairs of FBAR with an inter-digital coupling configuration. Both narrow electrode finger width and multiple coupled finger pairs enhance lateral acoustical coupling, resulting in filters with wider pass band. The finite element simulation and experimental results on LCRF structures show that the multiple acoustical modes can be combined to form a wider range of pass bands than available in a conventional ladder filter.

引用

页数：5

共 5 条

[1]

Hashimoto K, 2009, ARTECH HSE MICROW LI, P1

[2]

Kinsman R.G., 1987, CRYSTAL FILTERS

[3]

Lakin K. M., 2002 IEEE INT FREQ C, P8

[4] Parametric Study of Laterally Acoustically Coupled Bulk Acoustic Wave Filters [J].