Practical guides for x-ray photoelectron spectroscopy: First steps in planning, conducting, and reporting XPS measurements

被引:168
作者
Baer, Donald R. [1 ]
Artyushkova, Kateryna [2 ]
Brundle, Christopher Richard [3 ]
Castle, James E. [4 ]
Engelhard, Mark H. [1 ]
Gaskell, Karen J. [5 ]
Grant, John T. [6 ]
Haasch, Richard T. [7 ]
Linford, Matthew R. [8 ]
Powell, Cedric J. [9 ]
Shard, Alexander G. [10 ]
Sherwood, Peter M. A. [11 ]
Smentkowski, Vincent S. [12 ]
机构
[1] Pacific Northwest Natl Lab, Environm Mol Sci Lab, POB 999, Richland, WA 99352 USA
[2] Physical Elect Inc, Chanhassen, MN 55317 USA
[3] CR Brundle & Associates, 4215 Fairway Dr, Soquel, CA 95073 USA
[4] Univ Surrey, Dept Mech Engn Sci, Guildford GU2 7XH, Surrey, England
[5] Univ Maryland, Dept Chem & Biochem, College Pk, MD 20720 USA
[6] Surface Anal Consulting, Clearwater, FL 33767 USA
[7] Univ Illinois, Mat Res Lab, 104 S Goodwin Ave, Urbana, IL 61801 USA
[8] Brigham Young Univ, Dept Chem & Biochem, Provo, UT 84602 USA
[9] NIST, 100 Bur Dr, Gaithersburg, MD 20899 USA
[10] Natl Phys Lab, Teddington TW11 0LW, Middx, England
[11] Univ Washington, Dept Chem, Seattle, WA 98950 USA
[12] Gen Elect Global Res, 1 Res Circle,Bldg K1 1D41, New York, NY 12309 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2019年 / 37卷 / 03期
关键词
SURFACE CHEMICAL-ANALYSIS; AUGER-ELECTRON-SPECTROSCOPY; ISO/TC-201; STANDARD; SPECTRA; QUANTIFICATION; CORE; CURVE;
D O I
10.1116/1.5065501
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Over the past three decades, the widespread utility and applicability of x-ray photoelectron spectroscopy (XPS) in research and applications has made it the most popular and widely used method of surface analysis. Associated with this increased use has been an increase in the number of new or inexperienced users, which has led to erroneous uses and misapplications of the method. This article is the first in a series of guides assembled by a committee of experienced XPS practitioners that are intended to assist inexperienced users by providing information about good practices in the use of XPS. This first guide outlines steps appropriate for determining whether XPS is capable of obtaining the desired information, identifies issues relevant to planning, conducting, and reporting an XPS measurement, and identifies sources of practical information for conducting XPS measurements. Many of the topics and questions addressed in this article also apply to other surface-analysis techniques. Published by the AVS.
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页数:11
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