Small High-Resolution Angular Displacement Measurement Technology Based on Near-Field Image Acquisition

被引:8
作者
Jia, Xingdan [1 ,2 ]
Wan, Qiuhua [1 ]
Yu, Hai [1 ]
Sun, Ying [1 ]
Zhao, Changhai [1 ]
机构
[1] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Changchun 130033, Jilin, Peoples R China
[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
基金
中国国家自然科学基金;
关键词
Subdivision; high precision; high resolution; angular displacement measurement; image detector; OPTICAL ENCODER; ABSOLUTE; SENSOR;
D O I
10.1109/JSEN.2019.2911095
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Advances in fine photoelectric displacement measurement technology have made image angular displacement measurement technology via imaging method a popular research topic; it is now easier than ever to realize small-scale high-resolution angular displacement measurement. This paper proposes a small-sized high-resolution image angular displacement measurement technique based on near-field image acquisition. A measuring mechanism based on the lensless near-field image acquisition is first established. Next, based on the error code problem, a space-value-based code value correction algorithm is proposed. Finally, the proposed device is validated on an experimental system. The proposed technology can achieve 21-bit resolution and 20.14" angle measurement accuracy. The results presented here may provide a workable foundation for further research on image-type fine photoelectric displacement measurement technology.
引用
收藏
页码:6141 / 6146
页数:6
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