Short-pulse laser deposition of diamond-like carbon thin films

被引:45
作者
Banks, PS [1 ]
Dinh, L [1 ]
Stuart, BC [1 ]
Feit, MD [1 ]
Komashko, AM [1 ]
Rubenchik, AM [1 ]
Perry, MD [1 ]
McLean, W [1 ]
机构
[1] Lawrence Livermore Natl Lab, Laser Program, Livermore, CA 94550 USA
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1999年 / 69卷 / Suppl 1期
关键词
D O I
10.1007/s003390051415
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The high intensities present in and the non-thermal nature of ultrashort-pulse laser ablation provide a nearly ideal source for thin-film deposition. The high kinetic energies and high ion content in the ablation plume suggest that it would be useful for the creation of diamond thin films. We used a 120 fs, 3 W, 1 kHz laser to ablate a graphite target and characterized the resulting films. We were able to grow amorphous films of up to 18 mu m thick and free from graphite particulates with no annealing necessary and at rates up to 25 mu m/hr. The films had 40%-50% sp(3) bonds as measured by using EELS and had properties typical of PLD-generated diamond-like carbon films.
引用
收藏
页码:S347 / S353
页数:7
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