Electromagnetically actuated mirror arrays for use in 3-D optical switching applications

被引：67

作者：

Bernstein, JJ ^{[1
]}

Taylor, WP

Brazzle, JD

Corcoran, CJ

Kirkos, G

Odhner, JE

Pareek, A

Waelti, M

Zai, M

机构：

[1] Charles Stark Draper Lab Inc, Cambridge, MA 02139 USA

[2] Allegro Microsyst, Manchester, NH 03110 USA

[3] Sandia Natl Labs, Livermore, CA 94551 USA

[4] Corcoran Engn, Woods Hole, MA 02543 USA

[5] BAE Syst, Merrimack, NH USA

[6] Corning IntelliSense, Wilmington, MA 01887 USA

[7] Phonak AG, Staefa, Switzerland

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2004年 / 13卷 / 03期

关键词：

actuators; electromagnetic actuation; magnetic transducers; micromachining; mirror array; optical switching; quadrupole;

D O I：

10.1109/JMEMS.2004.828705

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents an electromagnetic MEMS mirror technology for use in 3-D optical switching applications. These mirrors may be actuated through large angles at low voltage and low current. Multiple coils on the backs of the mirrors interact with permanent magnetic fields to provide two-axis orthogonal actuation. A custom package brings the MEMS mirror array and magnets into close proximity. Actuation is linear versus drive current on both axes, and displays negligible charging and drift. These mirrors have achieved greater than 10degrees mechanical rotation per mA in each axis. The mirror rotation angle is hysteresis free to less than the 0.01degrees measurement accuracy.

引用

页码：526 / 535

页数：10

共 22 条

[1] SILICON MICROMACHINED 2-DIMENSIONAL GALVANO OPTICAL SCANNER [J].

ASADA, N ;

MATSUKI, H ;

MINAMI, K ;

ESASHI, M .

IEEE TRANSACTIONS ON MAGNETICS, 1994, 30 (06) :4647-4649

[2] Silicon micro-optical scanner [J].

Asada, N ;

Takeuchi, M ;

Vaganov, V ;

Belov, N ;

Hout, SI ;

Sluchak, I .

SENSORS AND ACTUATORS A-PHYSICAL, 2000, 83 (1-3) :284-290

[3]

Brazzle JD, 2003, BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, P1152

[4] A low-voltage two-axis electromagnetically actuated micromirror with bulk silicon mirror plates and torsion bars [J].

Cho, IJ ;

Yun, KS ;

Lee, HK ;

Yoon, JB ;

Yoon, E .

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2002, :540-543

[5]

DEWA AS, 2000, P SOL STAT SENS ACT, P93

[6]

Dokmeci MR, 2002, 2002 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, CONFERENCE DIGEST, P15, DOI 10.1109/OMEMS.2002.1031421

[7]

HORNBECK LJ, P 1993 INT EL DEV MT, P381

[8] Movable vertical mirror arrays for optical microswitch matrixes and their electromagnetic actuation [J].

Houlet, L ;

Helin, P ;

Bourouina, T ;

Reyne, G ;

Dufour-Gergam, E ;

Fujita, H .

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2002, 8 (01) :58-63

[9] Design and fabrication of electromagnetic micromirror with bulk silicon mirror plate and aluminum spring [J].

Ji, CH ;

Kim, YK ;

Choi, BK .

2000 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, 2000, :97-98

[10] Magnetically actuated, addressable microstructures [J].

Judy, JW ;

Muller, RS .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1997, 6 (03) :249-256

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