Thermal management of micro-hotplates using MEMCAD as simulation tool

被引：0

作者：

Briand, D ^{[1
]}

Grétillat, MA ^{[1
]}

van der Schoot, B ^{[1
]}

de Rooij, NF ^{[1
]}

机构：

[1] Inst Microtechnol, CH-2007 Neuchatel, Switzerland

来源：

2000 INTERNATIONAL CONFERENCE ON MODELING AND SIMULATION OF MICROSYSTEMS, TECHNICAL PROCEEDINGS | 2000年

关键词：

micro-hotplates; FEM simulation; MEMCAD; thermal; gas sensors;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper we report on the electrothermal simulations per-formed in the aim of optimising the power consumption and the temperature distribution of micro-hotplates for gas sensing applications. The micro-hotplate designs were optimised using the software MEMCAD from Microcosm Technologies. From the results obtained, we propose a micro-hotplate design with a silicon island underneath the membrane. The silicon island ensures an uniform temperature over the sensing area for the metal-oxide gas sensors. Moreover, it allows to thermally isolating electronic components and was used to lower the power consumption of MOSFET gas sensors. The optimised micro-hotplates are suitable for. applications in the automotive industry and in electronic nose instruments.

引用

页码：640 / 643

页数：4