Thermal management of micro-hotplates using MEMCAD as simulation tool

被引：0
|
作者：
Briand, D [1 ]
Grétillat, MA [1 ]
van der Schoot, B [1 ]
de Rooij, NF [1 ]
机构：
[1] Inst Microtechnol, CH-2007 Neuchatel, Switzerland
来源：
2000 INTERNATIONAL CONFERENCE ON MODELING AND SIMULATION OF MICROSYSTEMS, TECHNICAL PROCEEDINGS | 2000年
关键词：
micro-hotplates; FEM simulation; MEMCAD; thermal; gas sensors;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper we report on the electrothermal simulations per-formed in the aim of optimising the power consumption and the temperature distribution of micro-hotplates for gas sensing applications. The micro-hotplate designs were optimised using the software MEMCAD from Microcosm Technologies. From the results obtained, we propose a micro-hotplate design with a silicon island underneath the membrane. The silicon island ensures an uniform temperature over the sensing area for the metal-oxide gas sensors. Moreover, it allows to thermally isolating electronic components and was used to lower the power consumption of MOSFET gas sensors. The optimised micro-hotplates are suitable for. applications in the automotive industry and in electronic nose instruments.
引用
收藏
页码：640 / 643
页数：4
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