[1] Osaka Univ, Inst Sci & Ind Res, Ibaraki, Osaka 5670047, Japan
[2] Matsushita Elect Corp, ULSI Proc Technol Dev Ctr, Minami Ku, Kyoto 6018413, Japan
[3] Matsushita Elect Corp, Corp Planning Dept, Semicond Grp, Kyoto 6178520, Japan
[4] Matsushita Elect Ind Co Ltd, Display Device Dev Ctr, Moriguchi, Osaka 5700005, Japan
[5] Osaka Univ, Res Ctr Photoenerget Organ Mat, Osaka, Japan