Microstructure and mechanical properties of vanadium carbide coatings synthesized by reactive magnetron sputtering

被引：29

作者：

Wu, Xiaoyan ^{[1
]}

Li, Guangze ^{[1
]}

Chen, Yanghui ^{[1
]}

Li, Geyang ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, State Key Lab Met Matrix Composites, Shanghai 200240, Peoples R China

来源：

INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS | 2009年 / 27卷 / 03期

基金：

中国国家自然科学基金;

关键词：

Vanadium carbide; Hard coatings; Microstructure; Mechanical properties; Magnetron sputtering; TITANIUM; HARDNESS; FILMS; STATE;

D O I：

10.1016/j.ijrmhm.2008.09.014

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Vanadium carbide coatings with different carbon contents were synthesized in Ar-C2H2 mixture by reactive magnetron sputtering. Energy-dispersive X-ray analysis, X-ray diffraction analysis, scanning electron microscopy, atomic force microscopy and nanoindentation were employed to investigate the effect of C2H2 partial pressure on the composition, phase, microstructure and mechanical properties of the coatings. The results show that vanadium carbide coatings can be synthesized at a low partial pressure of C2H2. The c-VC coating with columnar crystal is obtained when the proportion Of C2H2 partial pressure is only similar to 3% in the mixture. It reaches the peak hardness of 35.5 GPa and elastic modulus of 358 GPa, respectively. The presence of excessive carbon with increased C2H2 partial pressure in the h-VC coating leads to the significant decrease of hardness and elastic modulus. (C) 2008 Elsevier Ltd. All rights reserved.

引用

页码：611 / 614

页数：4

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