An asymmetric channel SOI nMOSFET for reducing parasitic effects and improving output characteristics

被引:38
作者
Pavanello, MA [1 ]
Martino, JA
Dessard, V
Flandre, D
机构
[1] Univ Sao Paulo, Lab Sistemas Integraveis, BR-05508900 Sao Paulo, Brazil
[2] Catholic Univ Louvain, Microelect Lab, B-1348 Louvain, Belgium
关键词
D O I
10.1149/1.1390955
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
A device based on an asymmetric channel doping profile with the aim of reducing the inherent parasitic bipolar effects in fully depleted silicon-on-insulator (SOI) devices and improving the output characteristics is introduced. Measurements and two-dimensional simulations are used to study the device capabilities and limitations. (C) 1999 The Electrochemical Society. S1099-0062(99)07-087-X. All rights reserved.
引用
收藏
页码:50 / 52
页数:3
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