Computer simulation of ion sputtering of polyatomic multilayered targets

被引：21

作者：

Ber, BJ ^{[1
]}

Kharlamov, VS ^{[1
]}

Kudrjavtsev, YA ^{[1
]}

Merkulov, AV ^{[1
]}

Trushin, YV ^{[1
]}

Zhurkin, EE ^{[1
]}

机构：

[1] LENINGRAD STATE TECH UNIV,ST PETERSBURG 195251,RUSSIA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1997年 / 127卷

关键词：

D O I：

10.1016/S0168-583X(96)00941-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The novel binary collision approximation Monte Carlo (BCA-MC) computer codes TRIRS and DYTRIRS for simulating ion sputtering of polyatomic nonuniform amorphous targets are presented. TRIRS simulates the collision cascade in a target and related secondary processes, including sputtering, damage generation etc., being more realistic than similar MC-BCA codes in modeling low-energy interatomic collisions. These improvements ensure better simulation of low-energy atomic collision processes in nonuniform targets, like sputtering, and ultra-low energy ion implantation. DYTRIRS is the extension of TRIRS which simulates the dynamics of the ballistic stage of ion-induced modification and sputtering for a target under high-fluence ion irradiation. The efficiency of DYTRIRS is verified by comparing the simulation of sputtering and secondary-inn mass-spectrometry in-depth compositional profiling of molecular-beam epitaxy grown two-dimensional (Al,Ga)As-GaAs (001) heterostructures, including structures with silicon and aluminum marker layers.

引用

页码：286 / 290

页数：5

共 17 条

[1]

Andersen H. H., 1981, Sputtering by particle bombardment I. Physical sputtering of single-element solids, P145

[2]

[Anonymous], SPUTTERING PARTICLE

[3]

BER BJ, 1992, NAUCHNOE PRIBOROSTRO, V2, P31

[4] SPUTTERING STUDIES WITH THE MONTE-CARLO PROGRAM TRIM.SP [J].