Influence of coil geometry on the induction heating process in crystal growth systems

被引：21

作者：

Tavakoli, M. H. ^{[1
]}

Ojaghi, A. ^{[1
]}

Mohammadi-Manesh, E. ^{[1
]}

Mansour, M. ^{[1
]}

机构：

[1] Bu Ali Sina Univ, Dept Phys, Hamadan 65174, Iran

来源：

JOURNAL OF CRYSTAL GROWTH | 2009年 / 311卷 / 06期

关键词：

Computer simulation; Induction heating; Czochralski method; SEEDING PROCESS; FLUID-FLOW; TRANSPORT;

D O I：

10.1016/j.jcrysgro.2009.01.092

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Different shapes and orientations of the RF-coil turns in oxide Czochralski crystal growth systems are considered and corresponding results of electromagnetic field and volumetric heat generation have been computed using a finite element method. For the calculations, the eddy current in the induction coil (i.e. the self-inductance effect) has been taken into account. The calculation results show the importance of cross section shape, geometry and position of the RF-coil turns with respect to the crucible and afterheater on the heat generation distribution in a Czochralski growth system. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：1594 / 1599

页数：6

共 7 条

[1]

Leatherman A.F., 1969, Induction Heating Advances: Application to 5800 F

[2]

Rudnev V., 2003, Handbook of Induction Heating

[3] Influence of active afterheater on the induction heating process in oxide Czochralski systems [J].