Thermal Properties of Some Volatile Titanium (IV) Precursors

被引：9

作者：

Filatov, E. S. ^{[1
]}

Nizard, H. ^{[2
]}

Semyannikov, P. P. ^{[1
]}

Sysoev, S. V. ^{[1
]}

Trubin, S. V. ^{[1
]}

Morozova, N. B. ^{[1
]}

Zherikova, K. V. ^{[1
]}

Gelfond, N. V. ^{[1
]}

机构：

[1] SB RAS, Nikolaev Inst Inorgan Chem, Novosibirsk 630090, Russia

[2] EADS Deutschland GmbH, Corp Res Ctr, D-81663 Munich, Germany

来源：

EUROCVD 17 / CVD 17 | 2009年 / 25卷 / 08期

关键词：

CVD;

D O I：

10.1149/1.3207639

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

The thermal properties of some titanium precursors such as titanium (IV) isopropoxide (Ti[OPri](4) = TTIP); titanium(IV) ethoxide (Ti[OEt](4)); titanium tetradimethylaminopropanol (Ti[DMAP](4)) have been investigated by complex thermal analysis (therm ogravimetri c analysis etc.), mass-spectrometry, ten sim etri c methods (static and flow methods). The temperature dependences of saturated vapour pressure of titanium precursors have been obtained in a wide range of temperatures and thermodynamic parameters of vaporization processes have been calculated. Thermal decomposition of TTIP vapor has been investigated by high temperature mass spectrometry; temperature range and gaseous by-products were determined.

引用

页码：557 / 560

页数：4

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