Characterization of the Nanoporous Template Using Anodic Alumina Method

被引：7
|
作者：
Houng, Mau-Phon [1 ]
Lu, Wei-Lun [1 ]
Yang, Tsung-Hsin [2 ]
Lee, Kuan-Wei [2 ]
机构：
[1] Natl Cheng Kung Univ, Inst Microelect, Dept Elect Engn, Tainan 701, Taiwan
[2] I Shou Univ, Dept Elect Engn, Kaohsiung 840, Taiwan
来源：
JOURNAL OF NANOMATERIALS | 2014年 / 2014卷
关键词：
FABRICATION; FILMS;
D O I：
10.1155/2014/130716
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Porous anodic aluminum oxide (AAO) is deposited on a 5 cm x 5 cm tin-doped indium oxide (ITO)/glass substrate, and the AAO/ITO/glass structure thus formed is used to reduce the amount of unreacted Al inside the AAO template, thereby reducing the transmittance of the AAO/glass structure. The enhancement of transmittance is achieved by modulating the diameter of the pores and varying the applied bias. The proposed AAO can be used at a high applied bias (up to 120 V) to improve the uniformity of the current density. Following pore-widening treatment and posttreatment annealing, the morphologies and transmittance of the AAO/ITO/glass structure were also investigated.
引用
收藏
页数：7
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