Electrodissolution of Ti and p-Si in acidic fluoride media: formation ratio of oxide layers from electrochemical impedance spectroscopy

被引:48
作者
Frateur, I
Cattarin, S
Musiani, M
Tribollet, B
机构
[1] CNR, IPELP, Ist Polarog & Elettrochim Preparat, I-35127 Padua, Italy
[2] Univ Paris 06, CNRS, UPR15, F-75252 Paris 05, France
关键词
electropolishing; TiO2; SiO2; resistance; capacitance; hydrofluoric acid;
D O I
10.1016/S0022-0728(00)00050-4
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The electrodissolution of Ti and p-Si electrodes in acidic fluoride solutions has been investigated by electrochemical impedance spectroscopy as a function of potential E, fluoride concentration, pH and angular speed of the electrode, with the aim of characterising the oxide layers covering both materials. The impedance diagrams have been analysed to obtain the low frequency capacitance C-lf the high frequency capacitance C-hf and the product RhfI (where R-hf is the high frequency resistance and I the steady-state current). In the potential domain where the oxide thickness x is proportional to E, the formation ratio dx/dE has been computed from C-lf, C-hf and RhfI. The calculated values have been found to be in good mutual agreement and close to the ones found in the literature. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:202 / 210
页数:9
相关论文
共 35 条
[1]   INTERFACE CONDITION OF N-SI(111) DURING PHOTOCURRENT OSCILLATIONS IN NH4F SOLUTIONS [J].
AGGOUR, M ;
GIERSIG, M ;
LEWERENZ, HJ .
JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 1995, 383 (1-2) :67-74
[2]  
[Anonymous], ELECTROCHEMISTRY MET
[3]   An electrochemical and ellipsometric study of oxide growth on silicon during anodic etching in fluoride solutions [J].
Bailes, M ;
Bohm, S ;
Peter, LM ;
Riley, DJ ;
Greef, R .
ELECTROCHIMICA ACTA, 1998, 43 (12-13) :1757-1772
[4]   ELECTROCHEMICAL-BEHAVIOR OF THE PASSIVE TIN ELECTRODE IN H2SO4 SOLUTIONS AT VERY POSITIVE POTENTIALS [J].
BOJINOV, M ;
SALMI, K ;
SUNDHOLM, G .
JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 1993, 358 (1-2) :177-191
[5]   The ability of a surface charge approach to describe barrier film growth on tungsten in acidic solutions [J].
Bojinov, M .
ELECTROCHIMICA ACTA, 1997, 42 (23-24) :3489-3498
[6]   Kinetics of formation and properties of a barrier oxide film on molybdenum [J].
Bojinov, M ;
Belova, I ;
Raicheff, R .
JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 1996, 411 (1-2) :37-42
[7]   DISSOLUTION VALENCE OF TITANIUM IN FLUORINATED SULFURIC MEDIUM [J].
CAPRANI, A ;
EPELBOIN, I ;
MOREL, P .
JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 1973, 43 (01) :APP2-APP9
[8]  
CHARLOT G, 1956, REACTIONS CHIMIQUES
[9]   A VOLTAMMETRIC STUDY OF THE ANODIC-DISSOLUTION OF P-SI IN FLUORIDE ELECTROLYTES [J].
CHAZALVIEL, JN ;
ETMAN, M ;
OZANAM, F .
JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 1991, 297 (02) :533-540
[10]   In situ infrared study of the oscillating anodic dissolution of silicon in fluoride electrolytes [J].
Chazalviel, JN ;
da Fonseca, C ;
Ozanam, F .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1998, 145 (03) :964-973