A 2-DOF Circular-Resonator-Driven In-Plane Vibratory Grating Laser Scanner

被引：15

作者：

Du, Yu ^{[1
,2
]}

Zhou, Guangya ^{[1
]}

Cheo, Koon Lin ^{[1
]}

Zhang, Qingxin ^{[2
]}

Feng, Hanhua ^{[2
]}

Chau, Fook Siong ^{[1
]}

机构：

[1] Natl Univ Singapore, Singapore 117576, Singapore

[2] ASTAR, Inst Microelect, Singapore 117685, Singapore

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2009年 / 18卷 / 04期

关键词：

Diffraction grating; micro-opto-electro-mechanical; systems; microresonators; microscanners; PERFORMANCE;

D O I：

10.1109/JMEMS.2009.2023844

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we present the design, modeling, fabrication, and measurement results of a microelectromechanical systems (MEMS)-based in-plane vibratory grating scanner driven by a two-degree-of-freedom (2-DOF) comb-driven circular resonator for high-speed laser scanning applications. Diffraction grating driven by a 2-DOF circular resonator has the potential to scan at large amplitudes compared with those driven by a one-degree-of-freedom (1-DOF) comb-driven circular resonator or a 2-DOF electrical comb-driven lateral-to-rotational resonator. We have demonstrated that our prototype device, with a 1-mm-diameter diffraction grating is capable of scanning at 20.289 kHz with an optical scan angle of around 25.. A refined theoretical model with fewer assumptions is proposed, which can make the prediction of dynamic performance much more accurate.

引用

页码：892 / 904

页数：13

共 15 条

[1] Optical raster-scanning displays based on surface-micromachined polysilicon mirrors [J].

Hagelin, PM ;

Solgaard, O .

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 1999, 5 (01) :67-74

[2]

Inman DJ., 2014, ENG VIBRATIONS

[3]

Johnstone R., 2004, An introduction to surface-micromachining

[4] Technique for preventing stiction and notching effect on silicon-on-insulator microstructure [J].

Li, J ;

Zhang, QX ;

Liu, AQ ;

Goh, WL ;

Ahn, J .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (06) :2530-2539

[5] Surface-micromachined microoptical elements and systems [J].

Muller, RS ;

Lau, KY .

PROCEEDINGS OF THE IEEE, 1998, 86 (08) :1705-1720

[6] Bi-axial magnetic drive for scanned beam display mirrors [J].

Sprague, R ;

Montague, T ;

Brown, D .

MOEMS Display and Imaging Systems III, 2005, 5721 :1-13

[7] ELECTROSTATIC-COMB DRIVE OF LATERAL POLYSILICON RESONATORS [J].

TANG, WC ;

NGUYEN, TCH ;

JUDY, MW ;

HOWE, RT .

SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) :328-331

[8] Optical performance requirements for MEMS-scanner based microdisplays [J].

Urey, H ;

Wine, DW ;

Osborn, TD .

MOEMS AND MINIATURIZED SYSTEMS, 2000, 4178 :176-185

[9]

Urey H., 1998, P SOC PHOTO-OPT INS, V3636, P60

[10] Performance of a biaxial MEMS-based scanner for microdisplay applications [J].

Wine, DW ;

Helsel, MP ;

Jenkins, L ;

Urey, H ;

Osborn, TD .

MOEMS AND MINIATURIZED SYSTEMS, 2000, 4178 :186-196

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