Angular distribution of atoms ejected by laser ablation of different metals

被引:30
作者
Konomi, I. [1 ,2 ]
Motohiro, T. [1 ,2 ]
Asaoka, T. [2 ]
机构
[1] Toyota Technol Inst, Tempaku Ku, Nagoya, Aichi 4688511, Japan
[2] Toyota Cent Res & Dev Labs Inc, Aichi 4801192, Japan
关键词
indium; laser ablation; specific heat; sublimation; tantalum; thermal conductivity; tin; zirconium; THIN-FILMS; DEPOSITION; EVAPORATION; DYNAMICS; TARGET;
D O I
10.1063/1.3160305
中图分类号
O59 [应用物理学];
学科分类号
摘要
Angular distributions of 13 different metals ejected by laser ablation using fourth harmonics (wavelength=266 nm) of neodymium doped yttrium aluminum garnet laser and a fluence close to near-threshold value (2.3 J/cm(2)) have been investigated with a high angular resolution. The angular distribution which is characterized by the exponent n of cos(n) theta distribution showed very broad range of values between 3 and 24 for different metals. A simple relation that the exponent n is proportional to the square root of particle atomic weight as reported previously has not been observed. Instead, a general trend has been found that the metals with higher sublimation energy such as Ta and Zr show narrower angular distribution than those with lower sublimation energy such as Sn and In. While the sublimation energy of metals has a great influence on the angular distribution of ejected atoms, a simple consideration suggests that their thermal conductivity and specific heat have little effect on it.
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页数:8
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