Structural and optical properties of ZnO epitaxial films grown on Al2O3 (1120) substrates by metalorganic chemical vapor deposition

被引:8
作者
Binh, NT
Zhang, BP
Liu, CY
Wakatsuki, K
Segawa, Y
Usami, N
Yamada, Y
Kawasaki, M
Koinuma, H
机构
[1] RIKEN, Inst Phys & Chem Res, Photodynam Res Ctr, Aoba Ku, Sendai, Miyagi 9800845, Japan
[2] Tokyo Inst Technol, Mat & Struct Lab, Yokohama, Kanagawa 2268503, Japan
[3] Tohoku Univ, Inst Mat Res, Sendai, Miyagi 9808577, Japan
[4] Tonghua Teachers Coll, Dept Phys, Tonghua, Jilin, Peoples R China
[5] Tohoku Univ, Grad Sch Sci, Dept Phys, Sendai, Miyagi 9808578, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2004年 / 43卷 / 7A期
关键词
ZnO; MOCVD; OMVPE; Al2O3; epitaxial growth; surface morphology; X-ray diffraction; photoluminescence; exciton-exciton scattering; critical thickness;
D O I
10.1143/JJAP.43.4110
中图分类号
O59 [应用物理学];
学科分类号
摘要
ZnO films of different thicknesses were grown on Al2O3 (1120) substrates by metalorganic chemical vapor deposition. Characterizations using X-ray diffraction and scanning electron microscopy demonstrated the transition from two-dimensional growth to three-dimensional growth with an increase in film thickness. Photoluminescence spectra revealed the thickness dependence of the exciton peak and a stimulated emission due to exciton-exciton scattering was observed.
引用
收藏
页码:4110 / 4113
页数:4
相关论文
共 50 条
  • [21] Optical, Structural Properties and Experimental Procedures of GaGdN Grown by Metalorganic Chemical Vapor Deposition
    Hung, I-Hsiang
    Lai, Yu-Hsiang
    Feng, Zhe Chuan
    Gupta, Shalini
    Zaidi, Tahir
    Ferguson, Ian
    Lu, Weijie
    TENTH INTERNATIONAL CONFERENCE ON SOLID STATE LIGHTING, 2010, 7784
  • [22] Optical properties of Na-doped ZnO nanorods grown by metalorganic chemical vapor deposition
    Lei, Meng
    He, Haiping
    Yu, Qianqian
    Chen, Cong
    Lu, Yangfan
    Ye, Zhizhen
    MATERIALS LETTERS, 2015, 160 : 547 - 549
  • [23] Effects of NH3 flow on structural and optical properties of ZnO films grown by atmospheric-pressure chemical vapor deposition
    Terasako, Tomoaki
    Ogura, Yoshinori
    Yagi, Masakazu
    THIN SOLID FILMS, 2019, 675 : 50 - 58
  • [24] Structural and optical properties of Al1-xInxN epilayers on GaN template grown by metalorganic chemical vapor deposition
    Lu Guo-Jun
    Zhu Jian-Jun
    Jiang De-Sheng
    Wang Yu-Tian
    Zhao De-Gang
    Liu Zong-Shun
    Zhang Shu-Ming
    Yang Hui
    CHINESE PHYSICS B, 2010, 19 (02)
  • [25] Characterization of β-Ga2O3 epitaxial films grown on MgO (111) substrates by metal-organic chemical vapor deposition
    Mi, Wei
    Ma, Jin
    Luan, Caina
    Lv, Yu
    Xiao, Hongdi
    Li, Zhao
    MATERIALS LETTERS, 2012, 87 : 109 - 112
  • [26] Growth and characterization of β-Ga2O3 thin films grown on off-angled Al2O3 substrates by metal-organic chemical vapor deposition
    Zhang, Yabao
    Zheng, Jun
    Ma, Peipei
    Zheng, Xueyi
    Liu, Zhi
    Zuo, Yuhua
    Li, Chuanbo
    Cheng, Buwen
    JOURNAL OF SEMICONDUCTORS, 2022, 43 (09)
  • [27] Effects of post-annealing on the electrical and optical properties of ZnO thin films grown on Al2O3 substrates by atomic layer epitaxy
    Lee, Chongmu
    Cho, Youngjoon
    Kim, Hojin
    Lee, Wangwoo
    Kim, Hyoun Woo
    Hwangbo, ChangKwon
    Lee, Jae Gab
    ECO-MATERIALS PROCESSING AND DESIGN VIII, 2007, 544-545 : 729 - +
  • [28] Optical and structural properties of GaN materials and structures grown on Si by metalorganic chemical vapor deposition
    Feng, ZC
    Zhang, X
    Chua, SJ
    Yang, TR
    Deng, JC
    Xu, G
    THIN SOLID FILMS, 2002, 409 (01) : 15 - 22
  • [29] Growth and characterization of Al2O3 gate dielectric films by low-pressure metalorganic chemical vapor deposition
    Shao, QY
    Li, AD
    Ling, HQ
    Wu, D
    Wang, Y
    Feng, Y
    Yang, SZ
    Liu, ZG
    Wang, M
    Ming, NB
    MICROELECTRONIC ENGINEERING, 2003, 66 (1-4) : 842 - 848
  • [30] Microstructural evolution and electrical property of Ta-doped SnO2 films grown on Al2O3(0001) by metalorganic chemical vapor deposition
    Kim, YW
    Lee, SW
    Chen, H
    THIN SOLID FILMS, 2002, 405 (1-2) : 256 - 262