[1] Tsinghua Univ, Dept Mech Engn, State Key Lab Tribol, Beijing 100084, Peoples R China
[2] Tsinghua Univ, Dept Mech Engn, Inst Mfg Engn, Beijing 100084, Peoples R China
[3] Tsinghua Univ, Beijing Key Lab Precis Ultraprecis Mfg Equipment, Beijing 100084, Peoples R China
[4] Beihang Univ, Sch Automat Sci & Elect Engn, Beijing 100191, Peoples R China
[5] Chengdu Aircraft Ind Grp Co Ltd, Chengdu 610092, Peoples R China