Silicon-Based Monolithic Planar Micro Thermoelectric Generator Using Bonding Technology

被引：44

作者：

Ziouche, Katir ^{[1
]}

Yuan, Zheng ^{[1
]}

Lejeune, Pascale ^{[1
]}

Lasri, Tuami ^{[1
]}

Leclercq, Didier ^{[1
]}

Bougrioua, Zahia ^{[1
]}

机构：

[1] Lille Univ, CNRS, IEMN Inst, F-59652 Villeneuve Dascq, France

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2017年 / 26卷 / 01期

关键词：

Thermoelectric; generator; silicon; monolithic;

D O I：

10.1109/JMEMS.2016.2633442

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A technology of planar micro thermoelectric generators (mu TEGs) with double thermal deflections is presented in this letter. We focus on the development of an original technic of bonding pillars etched on a first silicon wafer onto the fragile membranes of a second silicon wafer. The monolithic devices realized are able to convert waste heat into electrical power. The maximum output power for a five-membranesbased mu TEG is 12.3 mu W/cm(2), for an input power of 2 W/cm(2). This kind of mu TEG has a high thermal resistance. It is deduced to be 44.3 K/W, which allows a heat adaptation to any environment with a high thermal resistance.

引用

页码：45 / 47

页数：3

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