Life cycle inventory of a CMOS chip

被引：10

作者：

Boyd, Sarah ^{[1
]}

Dornfeld, David ^{[1
]}

Krishnan, Nikhil ^{[2
]}

机构：

[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA

[2] Capital Assets Engn, Appl Mat, Santa Clara, CA USA

来源：

PROCEEDINGS OF THE 2006 IEEE INTERNATIONAL SYMPOSIUM ON ELECTRONICS & THE ENVIRONMENT, CONFERENCE RECORD | 2006年

关键词：

Life Cycle Assessment (LCA); Life Cycle Inventory (LCI); design for environment (DFE); environmental management;

D O I：

10.1109/ISEE.2006.1650071

中图分类号：

X [环境科学、安全科学];

学科分类号：

08 ; 0830 ;

摘要：

A life cycle inventory for comparative assessment of assorted semiconductor device types is assembled using a library of process step-related information. In this paper, we present the structure of this library of energy use, material inputs and emissions data at the process equipment-level and facilities-scale, normalized per wafer. Selected results from a case study of a 130nm node CMOS device are presented and compared with a previous study of a comparable chip. Comparative production impacts of 6-layer and 8-layer CMOS devices are shown.

引用

页码：253 / +

页数：3

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