LP-MOCVD growth of BGaAsSb thick layers and BGaAsSb/GaAs quantum well structures on GaAs (001) substrates

被引:3
作者
Jia, Zhigang [1 ]
Wang, Qi [1 ]
Ren, Xiaomin [1 ]
Wang, Yifan [1 ]
Cai, Shiwei [1 ]
Zhang, Xia [1 ]
Huang, Yongqing [1 ]
机构
[1] Beijing Univ Posts & Telecommun, State Key Lab Informat Photon & Opt Commun, Beijing 100876, Peoples R China
基金
对外科技合作项目(国际科技项目); 中国国家自然科学基金;
关键词
Sb segregation; XRD; MOCVD; BGaAsSb; Boron; BAND ALIGNMENT; BXGA1-XAS; BGAINAS; ALLOYS;
D O I
10.1016/j.jcrysgro.2014.02.017
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
In this study, BGaAsSb thick layers and BGaAsSb/GaAs quantum wells (QWs) have been grown on GaAs (001) by low pressure metal-organic vapor deposition (LP-MOCVD) for the first time. It has been found that for both GaAs1-ySby thick layer and GaAs1_Sb-y(y)/GaAs QWs, the incorporation of boron leads to a decrease in Sb segregation and causes an increased solid Sb content y as well as a higher compressive strain. Similarly, Sb segregation also recedes when the arsenic partial pressure is lowered, and Sb-incorporation efficiency increases significantly. In both cases, the quaternary BGaAsSb alloys cannot be grown lattice-matched to GaAs. In addition, the PL peak wavelength red-shifts when boron is incorporated. This is in accordance with the increased Sb content. (C) 2014 Elsevier B.V. All rights reserved
引用
收藏
页码:74 / 80
页数:7
相关论文
共 20 条
[1]   GROWTH OF GAAS(1-X)SBX BY ORGANOMETALLIC VAPOR-PHASE EPITAXY [J].
BEDAIR, SM ;
TIMMONS, ML ;
CHIANG, PK ;
SIMPSON, L ;
HAUSER, JR .
JOURNAL OF ELECTRONIC MATERIALS, 1983, 12 (06) :959-972
[2]   ORGANOMETALLIC VPE GROWTH OF GAAS1-YSBY USING TRIMETHYL ANTIMONY AND GA1-XINXAS USING TRIMETHYL ARSENIC [J].
COOPER, CB ;
LUDOWISE, MJ ;
AEBI, V ;
MOON, RL .
JOURNAL OF ELECTRONIC MATERIALS, 1980, 9 (02) :299-309
[3]   HOMOGENEOUS AND HETEROGENEOUS THERMAL-DECOMPOSITION RATES OF TRIMETHYLGALLIUM AND ARSINE AND THEIR RELEVANCE TO THE GROWTH OF GAAS BY MOCVD [J].
DENBAARS, SP ;
MAA, BY ;
DAPKUS, PD ;
DANNER, AD ;
LEE, HC .
JOURNAL OF CRYSTAL GROWTH, 1986, 77 (1-3) :188-193
[4]   BGaInAs alloys lattice matched to GaAs [J].
Geisz, JF ;
Friedman, DJ ;
Olson, JM ;
Kurtz, SR ;
Reedy, RC ;
Swartzlander, AB ;
Keyes, BM ;
Norman, AG .
APPLIED PHYSICS LETTERS, 2000, 76 (11) :1443-1445
[5]   Epitaxial growth of BGaAs and BGaInAs by MOCVD [J].
Geisz, JF ;
Friedman, DJ ;
Kurtz, S ;
Olson, JM ;
Swartzlander, AB ;
Reedy, RC ;
Norman, AG .
JOURNAL OF CRYSTAL GROWTH, 2001, 225 (2-4) :372-376
[6]   MOVPE growth of BxGa1-xAs, BxGa1-x-yInyAs, and BxAl1-xAs alloys on (001) GaAs [J].
Gottschalch, V ;
Leibiger, G ;
Benndorf, G .
JOURNAL OF CRYSTAL GROWTH, 2003, 248 :468-473
[7]   Growth temperature effects on boron incorporation and optical properties of BGaAs/GaAs grown by MOCVD [J].
Hamila, R. ;
Saidi, F. ;
Rodriguez, P. H. ;
Auvray, L. ;
Monteil, Y. ;
Maaref, H. .
JOURNAL OF ALLOYS AND COMPOUNDS, 2010, 506 (01) :10-13
[8]   Structural properties of boron compounds at high pressure [J].
Hassan, FEH ;
Akbarzadeh, H ;
Zoaeter, M .
JOURNAL OF PHYSICS-CONDENSED MATTER, 2004, 16 (03) :293-301
[9]   GaAsSb/GaAs band alignment evaluation for long-wave photonic applications [J].
Johnson, SR ;
Guo, CZ ;
Chaparro, S ;
Sadofyev, YG ;
Wang, J ;
Cao, Y ;
Samal, N ;
Xu, J ;
Yu, SQ ;
Ding, D ;
Zhang, YH .
JOURNAL OF CRYSTAL GROWTH, 2003, 251 (1-4) :521-525
[10]   Effects of Ga- and Sb-precursor chemistry on the alloy composition in pseudomorphically strained GaAs1-ySby films grown via metalorganic vapor phase epitaxy [J].
Khandekar, A. A. ;
Yeh, J. Y. ;
Mawst, L. J. ;
Song, Xueyan ;
Babcock, S. E. ;
Kuech, T. F. .
JOURNAL OF CRYSTAL GROWTH, 2007, 303 (02) :456-465