Fabrication and characterization of nanostructured zinc oxide on printed microcontact electrode for piezoelectric applications

被引：19

作者：

Abubakar, Shamsu ^{[1
]}

Khalid, Naimah ^{[1
]}

Abd Rahman, Siti Fatimah ^{[2
]}

Tee, Tan Sin ^{[1
]}

Hamidon, Mohd Nizar ^{[3
]}

Talib, Zainal Abidin ^{[1
]}

Sagadevan, Suresh ^{[4
]}

Paiman, Suriati ^{[1
,3
]}

机构：

[1] Univ Putra Malaysia, Fac Sci, Dept Phys, Upm Serdang 43400, Selangor, Malaysia

[2] Univ Malaysia Perlis, Inst Nano Elect Engn, Jalan Kangar Alor Setar, Kangar 01000, Perlis, Malaysia

[3] Univ Putra Malaysia, Inst Adv Technol, Funct Device Lab, Upm Serdang 43400, Selangor, Malaysia

[4] Univ Malaya, Nanotechnol & Catalysis Res Ctr, Kuala Lumpur 50603, Malaysia

来源：

JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T | 2020年 / 9卷 / 06期

关键词：

ZnO nanorods; Nanostructures; Chemical bath deposition; Piezoelectric response; Interdigitated microelectrodes; Nanogenerators; ALIGNED ZNO NANORODS; GROWTH; ARRAYS; NANOWIRES;

D O I：

10.1016/j.jmrt.2020.11.038

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Dynamic integration of aligned nanostructures fabricated on different surfaces has prompted the needs for a novel nanoelectromechanical energy harvester. This study describes the morphologies of as-synthesized zinc oxide (ZnO) nano rod-like structures grown onto a bare sputtered substrate and patterned microcontact electrode (IDE), using a simple chemical bath deposition method (CBD). Local piezoresponse measurements were conducted to detect the piezoelectric response and polarization switching in Zinc oxide nanorods. The morphological characteristics and electromechanical response of the grown nanostructures on the printed electrode have been investigated, as a step towards enhancing the performance of piezoelectric nanogenerators. The growth characteristics and energy harvesting ability of nanostructured ZnO on interdigitated microelectrode (IDE) were reported. AFM analysis indicated that the average seed layer thickness of the ZnO film deposited before the lithographic pattern of the IDE was about similar to 267.5 nm. The FESEM images and XRD analysis confirmed that the ZnO nanorods possessed a hexagonal wurtzite structure having the c-axis crystal orientation preferentially in the (002) plane. FTIR spectrum confirmed the secondary vibrations of the Zn-O bonding at 669.75 cm(-1) even with the adjustment in the microstructural features of ZnO. Finally, the Piezoresponse Force Microscopy (PFM) analysis confirmed the converse piezoelectric response of the grown nanorods. (C) 2020 The Author(s). Published by Elsevier B.V.

引用

页码：15952 / 15961

页数：10

共 29 条

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