Electromechanical properties of lanthanum-doped lead hafnate titanate thin films for integrated piezoelectric MEMS applications

被引：6

作者：

Kuegeler, C. ^{[1
]}

Boettger, U. ^{[2
]}

Schneller, T. ^{[2
]}

机构：

[1] Res Ctr Julich, IFF, D-52425 Julich, Germany

[2] Rhein Westfal TH Aachen, IWE 2, D-52074 Aachen, Germany

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2009年 / 94卷 / 04期

关键词：

NEUTRON POWDER DIFFRACTION; CHEMICAL SOLUTION DEPOSITION; PHASE-TRANSITION; FABRICATION; CERAMICS; DESIGN;

D O I：

10.1007/s00339-008-5045-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper focuses on the deposition and electromechanical characterization of lanthanum-doped lead hafnate titanate (PLHT) thin films as key material in piezoelectric microelectromechanical systems (pMEMS). PLHT (x/30/70) and PLHT(x/45/55) films with a thickness between 150 nm and 250 nm were deposited by chemical solution deposition (CSD). Thereby x varies between 0 and 10% La content. The electrical characterization shows that undoped (x=0) PLHT exhibit ferroelectric behavior similar to PZT of the same composition. La doping results in reduced ferroelectric properties and also affects the electromechanical properties. Measurements using a double beam laser interferometer yield a piezoelectric coefficient d (33) of 60 pm/V, which stays constant with an increasing electric field. This leads to a linear displacement compared to undoped PLHT or conventional PZT films used for MEMS applications.

引用

页码：739 / 745

页数：7

共 31 条

[1]

Arik M, 1999, 1999 INTERNATIONAL CONFERENCE ON MODELING AND SIMULATION OF MICROSYSTEMS, P651

[2] Ferroelectric-paraelectric phase transition in PbHf0.2Ti0.8O3 studied by neutron powder diffraction [J].