Preparation of TiSi2 via flash lamp processing of TiN/Ti/Si heterostructures

被引：1

作者：

Ievlev, V. M. ^{[1
]}

Kannykin, S. V. ^{[2
]}

Kolos, V. V. ^{[3
]}

Kushchev, S. B. ^{[2
]}

Markevich, M. I. ^{[4
]}

Chaplanov, A. M. ^{[4
]}

Stel'makh, V. F. ^{[5
]}

机构：

[1] Voronezh State Univ, Voronezh 394006, Russia

[2] Voronezh State Tech Univ, Voronezh 394026, Russia

[3] NPO Integral Res & Prod Assoc, Minsk 220064, BELARUS

[4] Belarussian Acad Sci, Inst Phys & Technol, Minsk 220141, BELARUS

[5] Belarusian State Univ, Minsk 220030, BELARUS

来源：

INORGANIC MATERIALS | 2009年 / 45卷 / 07期

关键词：

TITANIUM SILICIDES;

D O I：

10.1134/S0020168509070127

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The structural and phase transformations induced in the TiN/Ti/Si system by flash processing with incoherent light have been studied by transmission electron microscopy and Auger electron spectroscopy. The conditions have been identified under which polycrystalline C49 or C54 TiSi2 films grow.

引用

页码：773 / 776

页数：4

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