Locally contacted rear surface passivated solar cells by inkjet printing

被引:0
作者
Phiwpha, N. [1 ]
Fangsuwannarak, T. [1 ]
Sopitpan, S. [2 ]
机构
[1] Suranaree Univ Technol, Inst Engn, Sch Elect Engn, Nakhon Ratchasima 30000, Thailand
[2] Thai Microelectron Ctr, Muang, Chachoengsao 24000, Thailand
来源
INTERNATIONAL CONFERENCE ON EXPERIMENTAL MECHANICS 2013 AND TWELFTH ASIAN CONFERENCE ON EXPERIMENTAL MECHANICS | 2014年 / 9234卷
关键词
silicon dioxide passivation; ink-jet printing; solar cell; aluminium-induced phase; oxide patterning;
D O I
10.1117/12.2054296
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
Inkjet printing of photoresist material may provide a new route for low-cost fabrication of patterned oxide passivation layer of solar cells that require fine patterning and simple process. However, printing by liquid-based, environmentally friendly ink and printing device required development efforts aimed at achieving a fine patterning and long used inkjet nozzles under corrosive influence. This work was demonstrated a concept for grooved silicon oxide patterning for rear localized contact of p-n junction solar cells by chemical etching after photoresist patterning obtained. This article reviews the silicon dioxide fabrication on p-Si substrate from sol-gel technique for oxide passivation layer of solar cells. The aluminium was deposited on the patterned oxide layer and then heated at its Al-Si eutectic temperature. Finally, an aluminium-induced solid-phase epitaxial growth of p(+) forming into the openings of the oxide passivation layer was presented. The sheet resistance of n-emitter layer, carrier life-time and surface recombination velocity values are investigated. Photoconductive measurements were performed on the prepared samples after each thermal process to measure the effective lifetime of the minority carriers. Carrier lifetime up to 60 microseconds has been measured on c-Si wafer passivated by the opened SiO2 layer. It was shown that the patterned SiO2 passivation has obtained high passivation quality making by the proposed inkjet printing method.
引用
收藏
页数:7
相关论文
共 12 条
  • [1] Aberle A.G., 1999, Crystalline silicon solar cells : advanced surface passivation and analysis / Armin G. Aberle
  • [2] 22.8-PERCENT EFFICIENT SILICON SOLAR-CELL
    BLAKERS, AW
    WANG, A
    MILNE, AM
    ZHAO, JH
    GREEN, MA
    [J]. APPLIED PHYSICS LETTERS, 1989, 55 (13) : 1363 - 1365
  • [3] Fabrication of silicon solar cells with rear pinhole contacts
    Ho, Anita W. Y.
    Wenham, Stuart R.
    [J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2007, 91 (13) : 1234 - 1242
  • [4] Lennon A. J., 2008, SOLAR ENERGY MAT SOL, V92, P1140
  • [5] Direct patterned etching of silicon dioxide and silicon nitride dielectric layers by inkjet printing
    Lennon, Alison J.
    Ho-Baillie, Anita W. Y.
    Wenham, Stuart R.
    [J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2009, 93 (10) : 1865 - 1874
  • [6] High-resolution ink-jet printing of all-polymer transistor circuits
    Sirringhaus, H
    Kawase, T
    Friend, RH
    [J]. MRS BULLETIN, 2001, 26 (07) : 539 - 543
  • [7] DIMENSIONLESS SOLUTION OF THE EQUATION DESCRIBING THE EFFECT OF SURFACE RECOMBINATION ON CARRIER DECAY IN SEMICONDUCTORS
    SPROUL, AB
    [J]. JOURNAL OF APPLIED PHYSICS, 1994, 76 (05) : 2851 - 2854
  • [8] Tang Y, 2011, MAT SCI SEMICONDUCTO
  • [9] LIQUID INK JET PRINTING WITH MOD INKS FOR HYBRID MICROCIRCUITS
    TENG, KF
    VEST, RW
    [J]. IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1987, 10 (04): : 545 - 549
  • [10] Zhao JH, 1999, PROG PHOTOVOLTAICS, V7, P471, DOI 10.1002/(SICI)1099-159X(199911/12)7:6<471::AID-PIP298>3.0.CO