Cathodoluminescence spectroscopic study of the boron-nitrogen co-doping diamond films

被引：0
|
作者：
Hatanaka, Yuko [1 ]
Takeuchi, Sadao [2 ]
Iwasaki, Koji [1 ]
Gamo, Hidenori [3 ]
Nakagawa, Kiyoharu [4 ]
Ando, Toshihiro [5 ]
Nishitani-Gamo, Mikka [1 ,4 ]
机构：
[1] Toyo Univ, Dept Appl Chem, Saitama, Japan
[2] Nippon Inst Technol, Fac Engn, Saitama, Japan
[3] Toppan Printing Co Ltd, Techn Res Inst, Saitama, Japan
[4] Toyo Univ, Sensor Photo Res Ctr, Saitama, Japan
[5] NIMS, Saitama, Japan
来源：
2008 INTERNATIONAL CONFERENCE ON CONTROL, AUTOMATION AND SYSTEMS, VOLS 1-4 | 2008年
关键词：
CVD diamond; boron-nitrogen co-doping diamond; cathodoluminescence spectroscopy;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
Co-doping diamond is of scientific and technologically interest because a new electrical and/or optical property is expected to obtain. In this study, we have carried out a simultaneous addition of diborane and nitrogen in the gas phase for the growth of co-doping diamonds by microwave plasma-assisted chemical vapor deposition (MPCVD) method. We measured the cathodoluminescence (CL) spectra of the co-doping diamond films. To investigate the effect of boron-nitrogen co-doping addition on the CL spectra, we compared the CL spectra of boron-nitrogen co-doping diamonds with those of nitrogen-doped diamonds. The results revealed that the addition of boron suppressed the nitrogen incorporation into the CVD diamonds.
引用
收藏
页码：870 / 873
页数：4
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