Optical study of wedge-shaped films. Part I. Modeling

被引：2

作者：

Shayapov, V. R. ^{[1
]}

Ayupov, B. M. ^{[1
]}

机构：

[1] Russian Acad Sci, AV Nikolaev Inst Inorgan Chem, Siberian Dept, Novosibirsk, Russia

来源：

JOURNAL OF OPTICAL TECHNOLOGY | 2016年 / 83卷 / 07期

关键词：

ATOMIC LAYER DEPOSITION; THICKNESS UNIFORMITY; THIN-FILMS; SPECTROPHOTOMETRY; REFLECTANCE;

D O I：

10.1364/JOT.83.000441

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This paper, which is being published in two parts, provides a summary and analysis of the various effects that occur in ellipsometry and reflection spectroscopy studies of wedge-shaped thin films. In the first part of the paper, we calculate various optical characteristics of wedge-shaped films on substrates: the reflection coefficients and the spatial distribution of the light intensity entering a null-ellipsometer detector. We discuss whether existing theoretical approaches can be used in the study of wedge-shaped films and examine specific issues that arise when using null ellipsometry to determine the ellipsometric parameters (psi and Delta) of such films. Part II of this paper will describe the results obtained through an experimental study of wedge-shaped films. (C) 2017 Optical Society of America.

引用

页码：441 / 446

页数：6

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