Wavefront analysis with high-accuracy inversion interferometer

被引：0
|
作者：
Spektor, B
Shamir, J
Bekker, AM
机构：
[1] Technion-Israel Inst. of Technology, Electrical Engineering Department
[2] Inst. of Automation and Electrometry, Siberian Branch, USSR Academy of Sciences, Novosibirsk
[3] Lab. of Optical Info. Processing, IA and E
[4] Department of Electrical Engineering, Technion-Israel Inst. of Technology, Haifa
[5] Department of Physics, Technion
[6] Israel Laser and Electro-Optic Soc., International Commission for Optics
来源：
OPTICAL ENGINEERING | 1997年 / 36卷 / 06期
关键词：
wavefront sensing; phase-shift interferometry; Fresnel lens array; wavefront inversion;
D O I：
10.1117/1.601369
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A recently introduced wavefront analyzer, based on a Fresnel-lens array, is improved by incorporating phase-shifting procedures. The resulting compact and stable interferometer can measure wavefront distortions with extremely high accuracy. In our experiments, with no special efforts at environmental isolation, the instrumental noise level was under 0.02 lambda. (C) 1997 Society of Photo-Optical Instrumentation Engineers.
引用
收藏
页码：1754 / 1759
页数：6
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