Development of liquid polyatomic ion beam system for surface modification

被引：8

作者：

Takaoka, GH ^{[1
]}

Tsumura, K ^{[1
]}

Yamamoto, T ^{[1
]}

机构：

[1] Kyoto Univ, Ion Beam Engn Expt Lab, Kyoto 6068501, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 2002年 / 41卷 / 6A期

关键词：

ion beam; polyatomic ion; ethanol; decane; polycarbonate; surface modification; wettability; contact angle; RBS channeling;

D O I：

10.1143/JJAP.41.L660

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have developed a new type of ion beam system using organic liquid materials, which has several advantages for surface modification based on the different structures of polyatomic ions. Mass-analyzed ion beams can be realized using a compact E x B mass filter. By utilizing different polyatomic ions of organic liquid materials such as ethanol and decane, the wettability of the polycarbonate (PC) surface can be controlled. In addition, the Rutherford backscattering spectrometry (RBS) channeling measurement shows that the fragmentation of the CH3CHOH ion occurs upon its impact on the Si surface with an incident energy of 6 keV. Thus, liquid polyatomic ion beams have a unique characteristic suitable for surface treatment that does not exist in atomic ion beams.

引用

页码：L660 / L662

页数：3

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