Investigation of defect properties in doped diamond films

被引:5
作者
Hu, XJ [1 ]
Li, RB
Shen, HS
He, XC
Deng, W
Luo, LX
机构
[1] Shanghai Jiao Tong Univ, State Key Lab MMCMS, Shanghai 200030, Peoples R China
[2] Guangxi Univ, Dept Phys, Nanning 530004, Peoples R China
关键词
diamond; doping; Doppler broadening measurements; EPR;
D O I
10.7498/aps.53.2014
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The defect properties in chemical vapor deposition diamond films doped by sulfur and boron were investigated by the Doppler broadening measurements and electron paramagnetic resonance (EPR). The results show that the defects annihilating the positrons is almost the same in various doped films, and the interactions between the dopants and the positrons are not distinct. In addition, a small amount of boron atoms can improve the quality of diamond films. The EPR signals of the diamond films arise from carbon dangling bonds.
引用
收藏
页码:2014 / 2018
页数:5
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