Gas sensing properties of SnO2 thin films grown by MBE

被引：17
|
作者：
Kroneld, M.
Novikov, S.
Saukko, S.
Kuivalainen, P.
Kostamo, P.
Lantto, V.
机构：
[1] Helsinki Univ Technol, Dept Elect & Commun Engn, Electron Phys Lab, FIN-02150 Espoo, Finland
[2] Univ Oulu, Microelect Lab, FIN-90014 Oulu, Finland
[3] Helsinki Univ Technol, Dept Elect & Commun Engn, Optoelect Lab, FIN-02150 Espoo, Finland
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2006年 / 118卷 / 1-2期
基金：
芬兰科学院;
关键词：
tin dioxide; molecular beam epitaxy; TIN OXIDE-FILMS; DEPOSITION; SAPPHIRE;
D O I：
10.1016/j.snb.2006.04.006
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
A comparative study of the gas sensing properties between mono- and poly-crystalline tin dioxide thin films has been carried out. SnO2 films of thickness range 30-100nm were deposited on r-axis sapphire substrate in temperature range 260-550 degrees C using the molecular beam epitaxy (MBE) technique. The crystalline structure of the resulting films was examined by using in situ high energy electron diffraction (RHEED), X-ray diffraction (XRD) and atomic force microscopy (AFM). The electrical properties of the films were characterized by using a Hall effect measurement system. Sensitivity towards different gases was tested and a comparison between mono- and poly-crystalline films is presented. Monocrystalline films were found to exhibit greater potential for continuous gas detection. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码：110 / 114
页数：5
相关论文
共 50 条
  • [1] A Comparative Study of Gas Sensing Properties of SnO2 and SnO2:Mo Films Grown by Magnetron Sputtering
    Chang, Wei-Che
    Lee, Shih-chin
    Qi, Xiaoding
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2010, 157 (07) : J245 - J250
  • [2] Effect of microwave irradiation on the gas sensing properties of SnO2 thin films
    Deepa, S.
    George, Andrew Simon
    MATERIALS TODAY-PROCEEDINGS, 2020, 33 : 2228 - 2232
  • [3] GAS SENSING MECHANISMS IN SNO2 THIN-FILMS
    COOPER, RB
    ADVANI, GN
    JORDAN, AG
    JOURNAL OF ELECTRONIC MATERIALS, 1981, 10 (03) : 455 - 472
  • [4] Impedometric humidity sensing characteristics of SnO2 thin films and SnO2–ZnO composite thin films grown by magnetron sputtering
    M. Velumani
    S. R. Meher
    Z. C. Alex
    Journal of Materials Science: Materials in Electronics, 2018, 29 : 3999 - 4010
  • [5] On the correlation between morphology and gas sensing properties of RGTO SnO2 thin films
    Szuber, J
    Uljanow, J
    Karczewska-Buczek, T
    Jakubik, W
    Waczynski, K
    Kwoka, M
    Konczak, S
    THIN SOLID FILMS, 2005, 490 (01) : 54 - 58
  • [6] Characterization and NO2 gas sensing properties of spray pyrolyzed SnO2 thin films
    Kamble, Dilly L.
    Harale, Namdev S.
    Patil, Vithoba L.
    Patil, Pramod S.
    Kadam, Laxrnan D.
    JOURNAL OF ANALYTICAL AND APPLIED PYROLYSIS, 2017, 127 : 38 - 46
  • [7] THE GROWTH OF THIN, EPITAXIAL SNO2 FILMS FOR GAS SENSING APPLICATIONS
    SEMANCIK, S
    CAVICCHI, RE
    THIN SOLID FILMS, 1991, 206 (1-2) : 81 - 87
  • [8] Photoluminescence properties of SnO2 thin films grown by thermal CVD
    Jeong, J
    Choi, SP
    Chang, CI
    Shin, DC
    Park, JS
    Lee, BT
    Park, YJ
    Song, HJ
    SOLID STATE COMMUNICATIONS, 2003, 127 (9-10) : 595 - 597
  • [9] Nanostructured SnO2 thin films for NO2 gas sensing applications
    Khuspe, G. D.
    Sakhare, R. D.
    Navale, S. T.
    Chougule, M. A.
    Kolekar, Y. D.
    Mulik, R. N.
    Pawar, R. C.
    Lee, C. S.
    Patil, V. B.
    CERAMICS INTERNATIONAL, 2013, 39 (08) : 8673 - 8679
  • [10] Effect of dendrite structures on gas sensing properties in in-doped SnO2 thin films
    Kaur, Jaswinder
    Vankar, V. D.
    Bhatnagar, M. C.
    SENSOR LETTERS, 2008, 6 (03) : 409 - 412
12345