RETRACTED: Ka-band distributed MEMS phase shifters on silicon using AlSi suspended membrane (Retracted Article)

被引：4

作者：

Qing, J ^{[1
]}

Shi, YL ^{[1
]}

Li, W ^{[1
]}

Lai, ZS ^{[1
]}

Zhu, ZQ ^{[1
]}

Xin, PS ^{[1
]}

机构：

[1] E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2004年 / 13卷 / 03期

关键词：

Ka-band; microelectromechanical systems (MEMS); phase shifter; structural parameters;

D O I：

10.1109/JMEMS.2004.828734

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the design, fabrication, and testing of distributed MEMS phase shifters for Ka-band communication systems. The phase shift can be obtained by changing MEMS bridge capacitors located periodically over the transmission line. Simulation results of phase shifters with various structural parameters are analyzed to develop the optimized designs. The phase shifters are fabricated on the high-resistivity silicon substrate, using suspended AlSi bridge membrane. The measured results demonstrate a phase shift of 286degrees at 36 GHz; with the actuation voltage of 25 V, and a return loss better than 10 dB over 0-40 GHz band. In addition, lifetimes of 3 x 10(6) cycles have been achieved for the fabricated phase shifter with all MEMS bridges held to be valid. It shows that AlSi alloy has a nice compromise between strength and resilience.

引用

页码：542 / 549

页数：8

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