Plasmonic Color Filter Array with High Color Purity for CMOS Image Sensors

被引:20
作者
Miyamichi, Atsutaka [1 ]
Ono, Atsushi [1 ,2 ]
Kagawa, Keiichiro [1 ,2 ]
Yasutomi, Keita [1 ,2 ]
Kawahito, Shoji [1 ,2 ]
机构
[1] Shizuoka Univ, Grad Sch Sci & Technol, Naka Ku, 3-5-1 Johoku, Hamamatsu, Shizuoka 4328561, Japan
[2] Shizuoka Univ, Res Inst Elect, Naka Ku, 3-5-1 Johoku, Hamamatsu, Shizuoka 4328011, Japan
关键词
surface plasmon; color filter; multiband; image sensors; metallic thin film; TRANSMISSION; SURFACE;
D O I
10.3390/s19081750
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
We demonstrate the multiband color filtering of a standard RGB color and a complementary CMY color by a plasmonic color filter, composed of concentric corrugated metallic thin film rings. The surface plasmon resonance is excited by the periodic corrugation, and the coupled light is transmitted through the central subwavelength aperture. Color selectivity is achieved not only in the visible but also in the near-infrared (NIR) region. Therefore, simultaneous imaging with visible and NIR can be realized by the integration of plasmonic color filters with sensors. We investigate the angle of incidence dependence of the transmission color selectivity and the color purity of the fabricated plasmonic color filter array.
引用
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页数:10
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