Sub-λ/10 spot size in semiconductor solid immersion lens microscopy

被引：4

作者：

Banaee, Mohamadreza G. ^{[1
]}

Uenlue, M. Selim ^{[1
,2
]}

Goldberg, Bennett B. ^{[1
,2
]}

机构：

[1] Boston Univ, Photon Ctr, Dept Elect & Comp Engn, Boston, MA 02215 USA

[2] Boston Univ, Photon Ctr, Dept Phys, Boston, MA 02215 USA

来源：

OPTICS COMMUNICATIONS | 2014年 / 315卷

关键词：

Optical microscopy; High-resolution imaging; Solid immersion lens; Apodization; Particle swarm optimization; SUBSURFACE MICROSCOPY; ORDER; BEAMS; POLARIZATION;

D O I：

10.1016/j.optcom.2013.11.005

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The angular spectrum of radially polarized Laguerre-Gaussian beams was tailored by an annular aperture in a semiconductor solid immersion lens microscope. The radii of two concentric rings in the amplitude aperture were optimized by a multi-objective particle swarm optimization algorithm. A GaAs solid immersion lens with NA=3.4 was used in the numerical calculation and a spot size of 98 nm (<lambda/10) at a wavelength of 1064 nm illumination was obtained. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：108 / 111

页数：4

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