Plasma Oxidation Printing into DLC and Graphite for Surface Functionalization

被引：2

作者：

Aizawa, Tatsuhiko ^{[1
]}

Wasa, Kenji ^{[2
]}

Nogami, Yoshiro ^{[3
]}

机构：

[1] SIT, Surface Design Engn Lab, 3-15-10 Minami Rokugo, Ota City, Tokyo 1440045, Japan

[2] MicroTeX Labs Llc, Ota Ku, Tokyo 1440045, Japan

[3] Thermographitics Co Ltd, Osaka 5510031, Japan

来源：

C-JOURNAL OF CARBON RESEARCH | 2019年 / 5卷 / 01期

关键词：

DLC-nozzle; DLC-punch array; vertically aligned graphite; surface-activated graphite; copper wet-plating; GRAPHENE;

D O I：

10.3390/c5010011

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A diamond-like carbon (DLC) film, coated on a AISI420-J2 stainless steel substrate and vertically aligned graphite (VAG), was structured by high-density plasma oxidation to work as a DLC-punch for micro-stamping and DLC-nozzle array for micro-dispensing, in addition to acting as a copper-plated thermal spreader, respectively. Thick DLC films were micro-patterned by maskless lithography and directly plasma-etched to remove the unmasked regions. Thick VAG (Ca plates were micro-patterned by screen-printing and selectively etched to activate the surface. Raman spectroscopy as well as electric resistivity measurement proved that there was no degradation of VAG by this surface activation. Wet plating was utilized to prove that copper wettability was improved by this surface treatment.

引用

页数：10

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