Fabrication and thermo stability of the SnO2/Ag/SnO2 tri-layer transparent conductor deposited by magnetic sputtering

被引：14
作者：
Wang, Wei [1 ]
Wei, Xiaojun [1 ,2 ]
Wang, Chuanshen [1 ]
Zhou, Wencai [1 ]
Zhu, Bailin [4 ]
Wang, Chongjie [4 ]
Liu, Linfei [3 ]
机构：
[1] China Triumph Int Engn Co Ltd, Technol Ctr, Shanghai, Peoples R China
[2] Inst Innovat New Glass Mat Anhui Co Ltd, Hefei, Anhui, Peoples R China
[3] Shanghai Jiao Tong Univ, Sch Phys & Astron, Minist Educ, Key Lab Artificial Struct & Quantum Control, Shanghai, Peoples R China
[4] Wuhan Univ Sci & Technol, State Key Lab Refractories & Met, Wuhan 430081, Peoples R China
来源：
CERAMICS INTERNATIONAL | 2021年 / 47卷 / 03期
关键词：
Transparent conductor; FTO; Ag interlayer; Multi-step annealing process; Solar cell; INDIUM-TIN-OXIDE; TCO MATERIALS; THIN-FILMS; PERFORMANCE; OPTIMIZATION; ELECTRODE;
D O I：
10.1016/j.ceramint.2020.09.201
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Using the magnetic sputtering technique, the SnO2/Ag/SnO2 tri-layer transparent films were fabricated on float glasses successfully. Compared with the commercial FTO (F-doped SnO2) film, the SnO2/Ag/SnO2 tri-layer films have higher visible-light transmittance and better conductivity. The total thickness of the SnO2/Ag/SnO2 films is one third of the commercial FTO film leading to the high visible-light transmittance. The high carrier concentration of the SnO2/Ag/SnO2 films contributes to the tri-layer films' low resistivity. In addition, to further improve the performance of the SnO2/Ag/SnO2 tri-layer films, samples were annealed under different temperatures. The results illustrate that the lowest sheet resistance (5.92 Omega/sq) and the highest visible-light transmittance (87.0%) were obtained after annealing at 200 degrees C. Furthermore, the thermal stability of the films could be enhanced by a multi-step annealing process due to the recrystallization effect.
引用
收藏
页码：3548 / 3552
页数：5
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