共 7 条
Large single crystal diamond plates produced by microwave plasma CVD
被引:15
作者:

Mokuno, Yoshiaki
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Inst Adv Ind Sci & Technol, Diamond Res Ctr, Osaka 5638577, Japan Natl Inst Adv Ind Sci & Technol, Diamond Res Ctr, Osaka 5638577, Japan

Chayahara, Akiyoshi
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Inst Adv Ind Sci & Technol, Diamond Res Ctr, Osaka 5638577, Japan Natl Inst Adv Ind Sci & Technol, Diamond Res Ctr, Osaka 5638577, Japan

Yamada, Hideaki
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Inst Adv Ind Sci & Technol, Diamond Res Ctr, Osaka 5638577, Japan Natl Inst Adv Ind Sci & Technol, Diamond Res Ctr, Osaka 5638577, Japan

Tsubouchi, Nobuteru
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Inst Adv Ind Sci & Technol, Diamond Res Ctr, Osaka 5638577, Japan Natl Inst Adv Ind Sci & Technol, Diamond Res Ctr, Osaka 5638577, Japan
机构:
[1] Natl Inst Adv Ind Sci & Technol, Diamond Res Ctr, Osaka 5638577, Japan
来源:
SILICON CARBIDE AND RELATED MATERIALS 2008
|
2009年
/
615-617卷
关键词:
diamond;
single crystal growth;
microwave plasma CVD;
ion implantation;
lift-off;
RATE HOMOEPITAXIAL GROWTH;
FILMS;
D O I:
10.4028/www.scientific.net/MSF.615-617.991
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
Recent developments in producing large single crystal CVD diamond plates are reviewed. The developments consist of synthesis of large single crystal diamond and production of single crystal diamond plates from the bulk diamond by the lift-off process. Combining these developments, half-inch single crystal CVD diamond plates have been successfully produced.
引用
收藏
页码:991 / 994
页数:4
相关论文
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