Large single crystal diamond plates produced by microwave plasma CVD

被引：15

作者：

Mokuno, Yoshiaki ^{[1
]}

Chayahara, Akiyoshi ^{[1
]}

Yamada, Hideaki ^{[1
]}

Tsubouchi, Nobuteru ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Diamond Res Ctr, Osaka 5638577, Japan

来源：

SILICON CARBIDE AND RELATED MATERIALS 2008 | 2009年 / 615-617卷

关键词：

diamond; single crystal growth; microwave plasma CVD; ion implantation; lift-off; RATE HOMOEPITAXIAL GROWTH; FILMS;

D O I：

10.4028/www.scientific.net/MSF.615-617.991

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Recent developments in producing large single crystal CVD diamond plates are reviewed. The developments consist of synthesis of large single crystal diamond and production of single crystal diamond plates from the bulk diamond by the lift-off process. Combining these developments, half-inch single crystal CVD diamond plates have been successfully produced.

引用

页码：991 / 994

页数：4

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