Large single crystal diamond plates produced by microwave plasma CVD

被引:15
作者
Mokuno, Yoshiaki [1 ]
Chayahara, Akiyoshi [1 ]
Yamada, Hideaki [1 ]
Tsubouchi, Nobuteru [1 ]
机构
[1] Natl Inst Adv Ind Sci & Technol, Diamond Res Ctr, Osaka 5638577, Japan
来源
SILICON CARBIDE AND RELATED MATERIALS 2008 | 2009年 / 615-617卷
关键词
diamond; single crystal growth; microwave plasma CVD; ion implantation; lift-off; RATE HOMOEPITAXIAL GROWTH; FILMS;
D O I
10.4028/www.scientific.net/MSF.615-617.991
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Recent developments in producing large single crystal CVD diamond plates are reviewed. The developments consist of synthesis of large single crystal diamond and production of single crystal diamond plates from the bulk diamond by the lift-off process. Combining these developments, half-inch single crystal CVD diamond plates have been successfully produced.
引用
收藏
页码:991 / 994
页数:4
相关论文
共 7 条
[1]   The effect of nitrogen addition during high-rate homoepitaxial growth of diamond by microwave plasma CVD [J].
Chayahara, A ;
Mokuno, Y ;
Horino, Y ;
Takasu, Y ;
Kato, H ;
Yoshikawa, H ;
Fujimori, N .
DIAMOND AND RELATED MATERIALS, 2004, 13 (11-12) :1954-1958
[2]   LOW-ENERGY ION-IMPLANTATION AND ELECTROCHEMICAL SEPARATION OF DIAMOND FILMS [J].
MARCHYWKA, M ;
PEHRSSON, PE ;
VESTYCK, DJ ;
MOSES, D .
APPLIED PHYSICS LETTERS, 1993, 63 (25) :3521-3523
[3]   Synthesis of large single crystal diamond plates by high rate homoepitaxial growth using microwave plasma CVD and lift-off process [J].
Mokuno, Y. ;
Chayahara, A. ;
Yamada, H. .
DIAMOND AND RELATED MATERIALS, 2008, 17 (4-5) :415-418
[4]   Synthesizing single-crystal diamond by repetition of high rate homoepitaxial growth by microwave plasma CVD [J].
Mokuno, Y ;
Chayahara, A ;
Soda, Y ;
Horino, Y ;
Fujimori, N .
DIAMOND AND RELATED MATERIALS, 2005, 14 (11-12) :1743-1746
[5]   Characterization of crystallinity of a large self-standing homoepitaxial diamond film [J].
Tsubouchi, Nobuteru ;
Mokuno, Y. ;
Yamaguchi, H. ;
Tatsumi, N. ;
Chayahara, A. ;
Shikata, S. .
DIAMOND AND RELATED MATERIALS, 2009, 18 (2-3) :216-219
[6]   FREESTANDING SINGLE-CRYSTALLINE CHEMICALLY VAPOR-DEPOSITED DIAMOND FILMS [J].
TZENG, Y ;
WEI, J ;
WOO, JT ;
LANFORD, W .
APPLIED PHYSICS LETTERS, 1993, 63 (16) :2216-2218
[7]   Very high growth rate chemical vapor deposition of single-crystal diamond [J].
Yan, CS ;
Vohra, YK ;
Mao, HK ;
Hemley, RJ .
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2002, 99 (20) :12523-12525