Design of a Decentralized Controller for a Glass RTP System

被引：4
作者：
Lee, Byeong Hyeon [1 ]
Kim, Junghwan [1 ]
Ji, Sanghyun [2 ]
Lee, Sungyong [2 ]
Lee, Kwang Soon [1 ]
机构：
[1] Sogang Univ, Dept Chem & Biomol Engn, Seoul 04107, South Korea
[2] AP Syst Corp, Hwaseong 18487, South Korea
来源：
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 2016年 / 29卷 / 01期
关键词：
Glass RTP; decentralized control; optimal sensor locations; input grouping; iterative learning control (ILC); ITERATIVE LEARNING CONTROL; WAFER TEMPERATURE UNIFORMITY;
D O I：
10.1109/TSM.2015.2513416
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The design of a decentralized controller has been studied as an integral part of the development of a commercial rapid thermal processing (RTP) system for manufacturing display glass. The glass RTP system uses bulb-type tungsten-halogen lamps for heating. A highly uniform temperature distribution with a maximum temperature difference of less than 6 degrees C between any two points is required during glass processing, regardless of the size of the glass. In designing a decentralized controller that satisfies this requirement, the problems of optimal sensor location, lamp grouping, optimization-based controller tuning, and time-varying bias input signals were identified and solved. The performance of the controller was investigated experimentally and numerically.
引用
收藏
页码：1 / 8
页数：8
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