Influences of Grinding and Polishing Parameters on the Quality of Super Smooth Surface

被引：1

作者：

Jin Yuzhu ^{[1
]}

Tong Yi ^{[1
]}

Jiao Lingyan ^{[1
]}

Wu Dongxu ^{[1
]}

Guo Weijin ^{[1
]}

机构：

[1] Tianjin Jinhang Inst Tech Phys, Tianjin 300192, Peoples R China

来源：

7TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: ADVANCED OPTICAL MANUFACTURING TECHNOLOGIES | 2014年 / 9281卷

关键词：

laser gyro; super smooth; slurry; polishing pad;

D O I：

10.1117/12.2067769

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Firstly, in this paper, a reasonable process flow is designed and the surface roughness of each procedure is tested. Secondly, the influences of particle size distribution of slurry on the quality of super smooth surface are studied, and then the conclusions are obtained that large span distribution of slurry will lead to surface scratches. Lastly, the effects of aging and ratios of polishing pad on the quality of super smooth surface are researched, and then some specific process parameters are gained such as shaving cycle and asphalt ratios in different environments.

引用

页数：6