CO2 gas sensing properties of DC reactive magnetron sputtered ZnO thin film

被引：101

作者：

Kannan, Padmanathan Karthick ^{[1
]}

Saraswathi, Ramiah ^{[1
]}

Rayappan, John Bosco Balaguru ^{[2
,3
]}

机构：

[1] Madurai Kamaraj Univ, Sch Chem, Dept Mat Sci, Madurai 625021, Tamil Nadu, India

[2] SASTRA Univ, Sch Elect & Elect Engn, Thanjavur 613401, Tamil Nadu, India

[3] SASTRA Univ, Ctr Nanotechnol & Adv Biomat, Thanjavur 613401, Tamil Nadu, India

来源：

CERAMICS INTERNATIONAL | 2014年 / 40卷 / 08期

关键词：

CO2 gas sensor; Zinc oxide; DC reactive magnetron sputtering; Thin film sensor; ZINC-OXIDE FILMS; OPTICAL-PROPERTIES; SENSOR; TEMPERATURE; SENSITIVITY; DEPOSITION; NANORODS; SILICON;

D O I：

10.1016/j.ceramint.2014.05.011

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Nanostructured ZnO thin films were deposited on glass substrates using a DC reactive magnetron sputtering technique. Thin films of three different thicknesses viz 40, 100 and 300 nm were prepared and subsequently annealed at 450 degrees C. The structural, topographical, and optical characteristics of all the three annealed films were studied using X-ray diffractometer (XRD), Atomic Force Microscope (AFM) UV-visible and photoluminescence spectrophotometers. The carbon dioxide (CO2) gas sensing behavior of these films was investigated in detail in the concentration range of 500-10,000 ppm. The sensing performance was optimized with respect to the ZnO film thickness as well as the operating temperature. ZnO film with 40 nm thickness showed better response characteristics at the operating temperature of 300 degrees C than that of thicker ZnO films. A maximum sensitivity (%) of 1.13 with a response and recovery time of 20 s was observed towards 1000 ppm of CO2. (C) 2014 Elsevier Ltd and Techna Group S.r.l. All rights reserved.

引用

页码：13115 / 13122

页数：8

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